Method for detecting quantity variation of high purity liquid chemicals and devices to carry out the method
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United States of America Patent
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May 11, 2004
Grant Date -
Oct 9, 2003
app pub date -
Apr 8, 2002
filing date -
Apr 8, 2002
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Abstract
This invention relates to a method for detecting quantity variation of high purity liquid chemicals by way of detecting capacitance variation to determine the liquid level of liquid chemicals. Meanwhile, the ratio of the area of the smallest electrode of the capacitor to the distance between the electrodes is adjusted to magnify the capacitance so that a very small variation can be observed clearly. This invention also discloses a device to carry out this method.
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