Method for separating and recovering conversion reaction gas
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United States of America Patent
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Jun 12, 2012
Grant Date -
Jun 4, 2009
app pub date -
Nov 26, 2008
filing date -
Nov 30, 2007
priority date (Note) -
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Abstract
Provided is a method for separating and recovering conversion reaction gas, wherein after a conversion reaction process for producing trichlorosilane from hydrogen gas and silicon tetrachloride comprising; condensing step of cooling discharged gas, separating step of silicon tetrachloride from the condensed liquid, and recovering disilicon hexachloride. For example, the method includes a first distillation process for distilling trichlorosilane from the condensed liquid, a second distillation process for distilling silicon tetrachloride from residual liquid of the first distillation process, and a third distillation process for distilling disilicon hexachloride from residual liquid of the second distillation process.
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