Scanning electron microscope and sample observation method using the same
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United States of America Patent
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May 25, 2004
Grant Date -
Oct 9, 2003
app pub date -
Apr 4, 2003
filing date -
Sep 17, 1999
priority date (Note) -
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Abstract
According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.
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