Storage container for precision substrates and a positioning mechanism therefor and a method of positioning the storage container for precision substrates
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United States of America Patent
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Dec 28, 1999
Grant Date -
N/A
app pub date -
Sep 28, 1998
filing date -
Sep 30, 1997
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A container includes a container body for accommodating wafers in alignment, a multiple number of positioning parts projectively formed integrally from the undersurface of the container body, and separate frame shaped guide members each provided so as to enclose the positioning parts. The end face of each positioning part is formed with a concavity, which gradually becomes narrowed from the exterior to the interior of the concave opening. Each guide member is formed with outer end faces gradually slanted from the outermost end to the inner boundary forming guide surfaces, which are approximately continuous to the inner surface of the concavity.
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