PSPI-based patterning method for RDL

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11749668
APP PUB NO 20220399323A1
SERIAL NO

17343402

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A semiconductor device is formed by providing a semiconductor package including a shielding layer and forming a slot in the shielding layer using a laser. The laser is turned on and exposed to the shielding layer with a center of the laser disposed over a first point of the shielding layer. The laser is moved in a loop while the laser remains on and exposed to the shielding layer. Exposure of the laser to the shielding layer is stopped when the center of the laser is disposed over a second point of the shielding layer. A distance between the first point and the second point is approximately equal to a radius of the laser.

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Patent Owner(s)

  • STATS CHIPPAC PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jung, JinHee Incheon, KR 39 45
Kim, ChangOh Incheon, KR 79 230

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