Method for determining curvilinear patterns for patterning device

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United States of America

PATENT NO 11232249
APP PUB NO 20210048753A1
SERIAL NO

16976492

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Abstract

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A method to determine a curvilinear pattern of a patterning device that includes obtaining (i) an initial image of the patterning device corresponding to a target pattern to be printed on a substrate subjected to a patterning process, and (ii) a process model configured to predict a pattern on the substrate from the initial image, generating, by a hardware computer system, an enhanced image from the initial image, generating, by the hardware computer system, a level set image using the enhanced image, and iteratively determining, by the hardware computer system, a curvilinear pattern for the patterning device based on the level set image, the process model, and a cost function, where the cost function (e.g., EPE) determines a difference between a predicted pattern and the target pattern, where the difference is iteratively reduced.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Been-Der Milpitas, US 21 189
Howell, Rafael C Santa Clara, US 24 157
Lu, Yen-Wen Saratoga, US 73 927
Su, Jing Fremont, US 157 1102
Zhang, Quan San Jose, US 86 455
Zou, Yi Foster City, US 79 379

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