Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus
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United States of America Patent
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Sep 9, 2014
Grant Date -
Aug 23, 2012
app pub date -
Feb 22, 2012
filing date -
Feb 23, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
In a method of manufacturing a liquid jet head, a piezoelectric substrate is bonded onto a first base. Ejection grooves for ejection channels and dummy grooves for dummy channels are alternately formed in parallel with one another. The ejection grooves and the dummy grooves have such a depth as to pierce the piezoelectric substrate and to reach the first base substrate. An electrode material is deposited on inner surfaces of the ejection grooves and the dummy grooves. A cover plate is bonded to the piezoelectric substrate so as to cover the ejection grooves and the dummy grooves. In a subsequent first base substrate removing step, a part of the first base substrate on a side opposite to the cover plate and the electrode material deposited on bottom surfaces of the dummy grooves are removed. A second base substrate is then bonded to the first base substrate.
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