Monolithic integration of a thin film transistor over a complimentary transistor

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United States of America Patent

PATENT NO 11699704
APP PUB NO 20210074702A1
SERIAL NO

16642356

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Abstract

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A semiconductor device comprising stacked complimentary transistors are described. In some embodiments, the semiconductor device comprises a first device comprising an enhancement mode III-N heterostructure field effect transistor (HFET), and a second device over the first device. In an example, the second device comprises a depletion mode thin film transistor. In an example, a connector is to couple a first terminal of the first device to a first terminal of the second device.

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Patent Owner(s)

  • INTEL CORP.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dasgupta, Sansaptak Hillsboro, US 243 1329
Dewey, Gilbert Hillsboro, US 440 4103
Le, Van H Portland, US 269 2821
Pillarisetty, Ravi Portland, US 449 7359
Rachmady, Willy Beaverton, US 426 5625
Radosavljevic, Marko Portland, US 465 4716
Sharma, Abhishek Hillsboro, US 274 1645
Then, Han Wui Portland, US 300 1979

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