Method of removing graphitic and/or fluorinated organic layers from the surface of a chip passivation layer having Si-containing compounds

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May 10, 2011
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Aug 28, 2008
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Feb 27, 2007
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Feb 27, 2007

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in the range of 500-750 mTorr.

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GLOBALFOUNDRIES INC.

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Inventor Name	Address	# of filed Patents	Total Citations
Lee, Kang-Wook	Yorktown Heights, US	96	2303

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Method of removing graphitic and/or fluorinated organic layers from the surface of a chip passivation layer having Si-containing compounds

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United States of America Patent

11679247

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PATENT NO	7938976
APP PUB NO	20080207002A1
SERIAL NO	11679247
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 10, 2011	US,7938976,B2 US7938976B2	GRANTED PATENT AS SECOND PUBLICATION
August 28, 2008	US,20080207002,A1 US20080207002A1	FIRST PUBLISHED PATENT APPLICATION

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11679247

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