Method for fabricating plasma reactor parts
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United States of America Patent
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Apr 5, 2011
Grant Date -
May 1, 2008
app pub date -
Jun 21, 2007
filing date -
Oct 30, 2006
priority date (Note) -
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Abstract
A method of fabricating yttria parts is provided herein. In one embodiment, the method includes sintering a yttria sample, machining the sintered sample to form a part, and annealing the part by heating the part at a predetermined heating rate, maintaining the part at a constant annealing temperature, and cooling the part at a predetermined cooling rate. At least one of the sintering and annealing atmospheres is an oxygen-containing atmosphere.
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