Multi-point thermocouples and assemblies for ceramic heating structures

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United States of America Patent

PATENT NO 11774298
APP PUB NO 20210247240A1
SERIAL NO

16789046

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Abstract

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Multi-point thermocouples and assemblies are disclosed for ceramic heating structures. The disclosed embodiments provide multi-point connections in distinct areas to provide good temperature-sensing contacts between metal thermocouples and ceramic bodies while also providing improved flexibility. As such, cracking of ceramic bodies for heating structures is avoided. For one embodiment, assemblies including a multi-point thermocouple and a ceramic body are used in bake plates for processing systems that process microelectronic workpieces. The metal thermocouple has a flat surface used for connections to the ceramic body. Preferably, the thermocouple is relatively thin and provides improved connection sites and flexibility.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asakura, Kentaro Yamanashi, JP 19 211
Mase, Takahisa Yamanashi, JP 4 308
Matsuo, Saki Yamanashi, JP 13 22
Mochizuki, Takashi Yamanashi, JP 66 1397
Verbaas, Melvin Yamanashi, JP 17 1405
Yoshioka, Nobutaka Yamanashi, JP 1 1

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