Method and apparatus for fast disturbance detection and classification
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United States of America Patent
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Nov 20, 2007
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app pub date -
May 16, 2005
filing date -
May 16, 2005
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Abstract
The present invention provides a method and apparatus for detecting step and impulse disturbances. The method includes determining a pattern based on a plurality of probabilities associated with a corresponding plurality of wafer processing parameters and determining a type of a disturbance based upon the pattern.
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