Lithographic apparatus with gas bearing supply mechanism and device manufacturing method
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United States of America Patent
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Jul 28, 2009
Grant Date -
Mar 13, 2008
app pub date -
Sep 8, 2006
filing date -
Sep 8, 2006
priority date (Note) -
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Abstract
A lithographic apparatus is disclosed that has a track comprising a plurality of gas outflow openings positioned along the track. A gas conduit is configured to feed pressurized gas to the gas outflow openings to form a gas bearing configured to moveably bear an object along the track. Further, a gas flow device is provided that is configured to cause or prevent flow of gas through one or more of the gas outflow openings dependent on a position of a guide surface of the object with respect to the gas outflow openings.
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