Integrated electrical cross-talk walls for electrostatic MEMS
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United States of America Patent
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May 25, 2010
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N/A
app pub date -
Aug 1, 2008
filing date -
Aug 7, 2007
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Abstract
To reduce cross-talk between adjacent hot electrodes, the present invention provides a ground plane, which extends beneath each side of a MEMS mirror platform covering opposite edges of a hot electrode along each side thereof. The ground plane includes an overhang section extending between the mirror platform and the hot electrode forming a first gap between the hot electrode and the overhang section, and a second gap between the overhang section and the mirror platform. The method of the present invention enables highly accurate construction using lithographic patterning and deep reactive ion etching (DRIE).
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