Low oxide trench dishing chemical mechanical polishing

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United States of America Patent

PATENT NO 11072726
SERIAL NO

16450732

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Abstract

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Chemical mechanical planarization (CMP) polishing compositions, methods and systems are provided to reduce oxide trench dishing and improve over-polishing window stability. High and tunable silicon oxide removal rates, low silicon nitride removal rates, and tunable SiO2: SiN selectivity are also provided. The compositions use a unique combination of abrasives such as ceria coated silica particles and chemical additives such as maltitol, lactitol, maltotritol or combinations as oxide trench dishing reducing additives.

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Patent Owner(s)

  • VERSUM MATERIALS US, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Murella, Krishna P Tempe, US 25 35
O'Neill, Mark Leonard Tempe, US 108 9359
Rose, Joseph D Tempe, US 17 11
Shi, Xiaobo Tempe, US 79 343
Zhou, Hongjun Tempe, US 74 92

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