Importance

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Abstract

A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object. The frame-shaped object holder (9), which carries the object in the edge region of the latter, surrounds a center through which passes a pivoting axis aligned parallel to the adjustment plane and intended for setting the angle of tilt of the second axis of rotation relative to the adjustment plane. Devices of this kind can be used to position flat objects in space for purposes of inspecting semiconductor wafers or flat panels.

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First Claim