Nonvolatile memory device and manufacturing method thereof
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United States of America Patent
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Aug 6, 2013
Grant Date -
Sep 29, 2011
app pub date -
Mar 10, 2011
filing date -
Mar 23, 2010
priority date (Note) -
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Abstract
According to the nonvolatile memory device in one embodiment, contact plugs connect between second wires and third wires in a memory layer and a first wire connected to a control element. Drawn wire portions connect the second wires and the third wires with the contact plug. The drawn wire portion connected to the second wires and the third wires of the memory layer is formed of a wire with a critical dimension same as the second wires and the third wires and is in contact with the contact plug on an upper surface and both side surfaces of the drawn wire portion.
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