Method for transferring epitaxy layer
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United States of America Patent
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Feb 3, 2004
Grant Date -
Jan 22, 2004
app pub date -
Oct 4, 2002
filing date -
Jul 17, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A method for transferring an epitaxy layer is provided. The method includes steps of (a) providing a first substrate, (b) forming a first epitaxy layer on the first substrate, (c) forming a masking layer having at least a pattern on the first epitaxy layer, (d) forming a second epitaxy layer on the masking layer, (e) bonding a second substrate to the second epitaxy layer, and (f) removing the masking layer and separating the second epitaxy layer from the first epitaxy layer, thereby the second epitaxy layer being transferred to the second substrate.
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