Integrated circuitry
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United States of America Patent
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May 27, 2003
Issued Date -
N/A
app pub date -
Mar 5, 1999
filing date -
Sep 2, 1998
priority date (Note) -
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Abstract
In one aspect, the invention includes a semiconductor device comprising: a) an electrically insulative layer over a substrate; b) an opening within the electrically insulative layer, the opening having a periphery defined at least in part by a bottom surface and a sidewall surface; c) a first layer comprising TiN within the opening, the first layer being over the bottom surface and along the sidewall surface; d) a second layer comprising elemental Ti over the electrically insulative layer but substantially not within the opening, the second layer having a thickness of less than 75.ANG. along the sidewall surface and over the bottom surface; and e) an aluminum-comprising layer within the opening and over the second layer. In another aspect, the invention includes a semiconductor device comprising: a) a first aluminum-comprising layer over an electrically insulative layer; b) a first titanium-comprising layer over the first aluminum-comprising layer; c) a second titanium-comprising layer over the first titanium-comprising layer, one of the first and second titanium-comprising layers comprising elemental Ti and the other of the first and second titanium-comprising layers comprising TiN; and d) a second aluminum-comprising layer over the second titanium-comprising layer.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- MICRON TECHNOLOGY, INC.
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Iyer, Ravi | Boise, ID | 151 | 3243 |
Sandhu, Gurtej S | Boise, ID | 1216 | 32397 |
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Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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