Microelectromechanical strain gauge with frequency detector
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United States of America Patent
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Aug 22, 2006
Grant Date -
Mar 31, 2005
app pub date -
Sep 30, 2003
filing date -
Sep 30, 2003
priority date (Note) -
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Abstract
A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm. A detector communicating with the flexible arm may detect the frequency of oscillation to provide, an indication of the transverse strain of the substrate.
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