Piezoelectric element, droplet-ejecting head, droplet-ejecting apparatus, and method of producing a piezoelectric element
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United States of America Patent
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Feb 9, 2010
Grant Date -
Mar 29, 2007
app pub date -
Apr 14, 2006
filing date -
Sep 27, 2005
priority date (Note) -
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Abstract
The present invention provides a piezoelectric element including a piezoelectric body and top and bottom electrodes holding the piezoelectric body therebetween, wherein an interlayer dielectric having an opening that defines an active area of the piezoelectric body is interposed between the piezoelectric body and the top electrode, and the top electrode is layered directly on the piezoelectric body in the active area of the piezoelectric body.
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