Semiconductor device including ferroelectric layer and metal particles embedded in metal-organic framework layer

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United States of America Patent

PATENT NO 11818895
APP PUB NO 20230064803A1
SERIAL NO

17581575

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Abstract

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A semiconductor device includes a substrate, a ferroelectric layer disposed on the substrate in a vertical direction, a charge trap layer disposed on the ferroelectric layer, a gate insulation layer disposed on the charge trap layer, and a gate electrode layer disposed on the gate insulation layer. The charge trap layer includes a metal-organic framework layer and metal particles embedded in the metal-organic framework layer.

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Patent Owner(s)

Patent OwnerAddress
SK HYNIX INC2091 GYEONGCHUNG-DAERO BUBAL-EUB ICHEON-SI GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koo, Won Tae Icheon-si, KR 22 0
Lee, Jae Gil Icheon-si, KR 42 189

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