Surface profile measuring instrument and surface profile measuring method
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United States of America Patent
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Sep 5, 2006
Grant Date -
Apr 14, 2005
app pub date -
Jul 8, 2003
filing date -
Jul 9, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A surface profile measuring instrument for measuring a surface profile of a workpiece has: a probe having a stylus provided with a measuring portion for measuring a surface of a workpiece at a tip end thereof and a detector for outputting a detection signal which varies depending on a measurement condition between the surface of the workpiece and the measuring portion; a scanning mechanism for relatively moving the measuring portion along the surface of the workpiece; a memory (46) that stores a position information of the contact portion when the detection signal reaches a predetermined reference signal value; a vibration inclination angle calculator (51) that calculates a response variation factor (vibration inclination angle .theta.) that applies variation to the detection signal from the surface of the workpiece; and a profile processor (53) that corrects the position information to obtain an actual profile of the surface of the workpiece using the response variation factor.
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Cited Art Landscape
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