Multilayered piezoelectric/electrostrictive ceramic actuator
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United States of America Patent
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-
Jan 7, 2003
Grant Date -
Sep 12, 2002
app pub date -
Dec 12, 2001
filing date -
Jul 7, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates a manufacturing method for a multilayered piezoelectric/electrostrictive ceramic actuator by a sintering process at low temperature. The present invention makes feasible a high quality image and high speed printing, as large displacement and high speed actuation are feasible because it can get greater displacement and driving speed, even with small variation in driving voltage, because of piezoelectric/electrostrictive layer and upper electrode being alternately heaped to produce a multilayer structure.
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