Control system and method of semiconductor inspection system
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United States of America Patent
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Mar 27, 2007
Grant Date -
Aug 25, 2005
app pub date -
Feb 23, 2005
filing date -
Feb 24, 2004
priority date (Note) -
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Abstract
A control system and method of a semiconductor inspection system are disclosed, wherein the inspection can be conducted without reducing the reliability of measurement even in the case where the supply voltage drops. The control system has a controller, a power supply for a power on-off circuit constituting a switching regulator designed to maintain the output voltage against a supply voltage drop, and a supply voltage drop detector. In the case where a supply voltage drop is detected during the measurement, the measurement is automatically suspended, and after restoring the supply voltage, the measurement is automatically restarted.
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