Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth

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United States of America Patent

PATENT NO 8220068
APP PUB NO 20090293162A1
SERIAL NO

12533427

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Abstract

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A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cohen, Guy M Mohegan Lake, US 190 2401
Hamann, Hendrik F Yorktown Heights, US 205 3715

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