Self aligning air bearing platform
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United States of America Patent
Stats
-
Jun 19, 1990
Grant Date -
N/A
app pub date -
Apr 27, 1989
filing date -
Apr 27, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Two partial cylindrical, externally pressurized static air bearings are used to provide a self aligning air bearing platform. The self aligning air bearing platform is useful in a tape automated bonding system to bond a semiconductor device having a high pin count. A bottom bearing block has a top surface in the shape of an arc and at least one air outlet. A middle bearing block has a bottom surface configured to mate with the top surface of the bottom bearing block. The middle bearing block also has a top surface in a shape of an arc which is rotated 90.degree. with respect to the arc shaped top surface of the bottom bearing block and at least one air outlet. A top bearing block mates with the middle bearing block and provides the platform for holding the semiconductor device. Air bearings between the moving bearing blocks provide a low friction bearing for the aligning platform.
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