Charged particle beam apparatus
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United States of America Patent
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Apr 17, 2007
Grant Date -
N/A
app pub date -
Dec 19, 2005
filing date -
Nov 22, 2005
priority date (Note) -
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Abstract
An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in which a lubricant was coated on a sliding portion of a movable member that moves inside a vacuum chamber, a substance from which low molecular components were removed is used as the lubricant. It is thus possible to inhibit sample contamination and suppress the occurrence of defects in a process following measurement of the samples.
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