Wafer-level alignment of optical elements

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United States of America Patent

PATENT NO 7680376
APP PUB NO 20080050081A1
SERIAL NO

11771642

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Abstract

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Methods are disclosed of fabricating an optical assembly. An active optical element is disposed near or on a first surface of a slab of optical material. A passive optical element is formed on a second surface of the slab, with the second surface being substantially parallel to the first surface. An optical axis of the passive optical element is aligned with an optical path between the passive optical element and an active region of the active optical element using a lithographic alignment process.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goebel, Andreas Mountain View, US 48 264
West, Lawrence C San Jose, US 92 1668
Wojcik, Gregory L Ben Lomond, US 16 383

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