Washing apparatus and washing method
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United States of America Patent
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Aug 10, 1999
Issued Date -
N/A
app pub date -
Aug 11, 1997
filing date -
May 26, 1995
priority date (Note) -
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Abstract
The present invention is directed to providing an apparatus which is improved so as to remove a contamination on a substrate efficiently. This apparatus includes a jet nozzle jetting out droplets toward a substrate. A liquid supply device and a gas supply device are connected to the jet nozzle. A mixing device mixing a liquid and a gas supplied to the jet nozzle and changing the liquid into the droplets is provided in the jet nozzle.
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