Image measurement method, image measurement program, image measurement device, and object manufacture method

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United States of America Patent

PATENT NO 11195294
APP PUB NO 20190139247A1
SERIAL NO

16095215

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Abstract

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To contribute to improved usability, an image measurement method includes selectably displaying geometric shape-related information in a measurement target, selectably displaying a measurement candidate of the measurement target based on a geometric shape corresponding to the selected geometric shape-related information (S38), and outputting a calculation result of the selected measurement candidate.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kubota, Junichi Yokohama, JP 26 224
Murakami, Motoi Yokohama, JP 1 1

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