Process for fabricating MEMS membrane with integral mirror/lens
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United States of America Patent
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Apr 24, 2007
Grant Date -
Nov 4, 2004
app pub date -
May 8, 2004
filing date -
Mar 12, 2001
priority date (Note) -
In Force
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Abstract
An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
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