Method of fabricating a micro-electro-mechanical apparatus for generating power responsive to mechanical vibration
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United States of America Patent
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Mar 8, 2011
Grant Date -
N/A
app pub date -
Nov 8, 2007
filing date -
Jul 28, 2004
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Abstract
A method for fabricating a monolithic micro-generator comprising: fabricating a plurality of magnet layer elements by preparing a semiconductor substrate surface to define: a plurality of coil layer recesses, a plurality of magnet wells, a plurality of integral compliant regions, and a plurality of bonding posts; disposing a ferromagnetic mass within each of a plurality of the magnet wells; fabricating a coil layer element by preparing a second semiconductor substrate surface to define a coil well, and one or more through holes, each hole disposed to accept a bonding post; disposing a conductive coil within the coil well; and bonding the upper bonding post surfaces of a magnet layer element to the corresponding upper bonding post surfaces of another magnet layer element with a coil layer element disposed between their upper surfaces such that each of the bonding posts passes through a corresponding through hole in the coil layer element.
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