Method of manufacturing nozzle plate
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United States of America Patent
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Apr 10, 2012
Grant Date -
Dec 18, 2008
app pub date -
Jun 12, 2008
filing date -
Jun 12, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of manufacturing a nozzle plate has steps of: (e) covering a surface of a plate with a light-curable resin; (f) covering the resin with a light-shielding member having an annular light-shielding region which encloses an opening of a nozzle hole therein in a plan view; (g) curing a portion of the resin not overlapping the light-shielding region by applying light after the step of (f); (h) exposing the resin by removing the light-shielding member after the step of (g); (i) eliminating an uncured portion of the resin after the step of (h); (j) forming a water-repellent coat on surfaces of the plate using the cured resins as masks, after the steps of (d) and (i); and (k) eliminating the cured resins after the step of (j).
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