Method of forming a micro-rotating device, and a micro-rotating device produced by the method
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United States of America Patent
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-
Jul 3, 2007
Grant Date -
Feb 17, 2005
app pub date -
Aug 10, 2004
filing date -
Aug 12, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A micro-rotating device has a rotor 200 (of diameter not more than 1.5 cm), a shaft 202 threaded through the rotor 200, and a shaft holder 207 for holding the shaft. The shaft holders are formed by etching an Si substrate 501 to form multiple shaft receiving openings 508. The rotors and shafts too are formed from respective Si substrates 301, 401. The rotors 200 are located over the shaft holders 207, and the shafts threaded through the rotors 200 into the openings 509 and attached there by a wafer bonding process. Then the substrate 501 is partitioned to give individual motor elements. Protrusions 206 extend from the rotor in the direction towards the stator to space the rotor from the shaft holder.
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