Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film

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United States of America Patent

PATENT NO 11898242
APP PUB NO 20210054500A1
SERIAL NO

16994025

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Abstract

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Methods for forming a polycrystalline molybdenum film over a surface of a substrate are disclosed. The methods may include: providing a substrate into a reaction chamber; depositing a nucleation film directly on an exposed surface of the substrate, wherein the nucleation film comprises one of a metal oxide nucleation film or a metal nitride nucleation film; and depositing a polycrystalline molybdenum film directly on the nucleation film; wherein the polycrystalline molybdenum film comprises a plurality of molybdenum crystallites having an average crystallite size of less than 80 Å. Structures including a polycrystalline molybdenum film disposed over a surface of a substrate with an intermediate nucleation film are also disclosed.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lotfi, Roghayyeh Scottsdale, US 6 182
Muhammad, Mustafa Gilbert, US 4 195
Shero, Eric Phoenix, US 63 17563
Stevens, Eric Christopher Tempe, US 10 373
Swaminathan, Shankar Phoenix, US 105 10204
Zope, Bhushan Phoenix, US 19 1899

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