Importance

Loading Importance Indicators...

Abstract

An exemplary pressure cavity is disclosed that is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The exemplary pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from ambient pressure in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g., intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.

Loading the Abstract Image...

First Claim