Measuring instrument
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United States of America Patent
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Mar 1, 2011
Grant Date -
Sep 17, 2009
app pub date -
Mar 2, 2009
filing date -
Mar 11, 2008
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A measuring instrument includes: an XY stage on which an object to be measured is placed; a probe holder having a plurality of probes; and a relative moving mechanism that relatively moves the XY stage and the probe holder. The probe holder is provided with a probe selection mechanism that has two guide rails obliquely arranged and advances and retracts at least two of the probes to be selectively positioned at and away from a probe selection position.
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