Method and system for characterizing porous materials
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United States of America Patent
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Oct 5, 2010
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Mar 22, 2007
filing date -
Jul 30, 2004
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Abstract
A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.
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