Triphenylsulfonium salt compound, and uses thereof

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United States of America Patent

PATENT NO 11746085
SERIAL NO

17284274

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Abstract

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The present invention discloses a triphenylsulfonium salt compound as shown in the general formula (I), wherein R1 represents an electron-withdrawing group and R2 represents an amplification group. Said compound shows significantly enhanced solubility and photosensitivity compared with unsubstituted triphenylsulfonium salts, and has significantly advantageous performance compared with prior art improved substitutes.

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Patent Owner(s)

  • CHANGZHOU TRONLY ADVANCED ELECTRONIC MATERIALS CO., LTD.; CHANGZHOU TRONLY NEW ELECTRONICS MATERIALS CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Qian, Xiaochun Jiangsu, CN 19 15

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