Importance

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Abstract

A memory cell array comprises first wiring lines, second wiring lines, and memory cells disposed at intersections thereof. A control circuit comprises a first power-supply line supplying a first voltage to selected ones of the first or second wiring lines, and first selection circuits connected between the first or second wiring lines and the first power-supply line, each first selection circuit comprising first and second transistors connected in series. The first selection circuits arranged along a first direction are connected to a first selection line. The first selection circuits arranged along a second direction perpendicular to the first direction are commonly connected to a second selection line. The first and second transistors each comprise a columnar semiconductor portion extending in a direction perpendicular to a semiconductor substrate, a gate-insulating film in contact with a side surface of the columnar semiconductor, and a gate electrode in contact with the gate-insulating film.

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First Claim