Coating compositions for use with an overcoated photoresist
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United States of America Patent
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Feb 8, 2005
Grant Date -
Sep 25, 2003
app pub date -
Sep 26, 2002
filing date -
Sep 26, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
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