Micro-mirror and a method for fabricating the same
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United States of America Patent
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Feb 6, 2007
Issued Date -
N/A
app pub date -
Dec 8, 2005
filing date -
Mar 8, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.
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