Silicon electrode assembly surface decontamination by acidic solution
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United States of America Patent
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Mar 24, 2009
Grant Date -
Jun 29, 2006
app pub date -
Dec 23, 2004
filing date -
Dec 23, 2004
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Abstract
Methods for cleaning silicon surfaces of electrode assemblies by efficiently removing contaminants from the silicon surfaces without discoloring the silicon surfaces using an acidic solution comprising hydrofluoric acid, nitric acid, acetic acid, and balance deionized water.
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