Semiconductor device with recessed gate and shield electrode

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United States of America Patent

PATENT NO 7528443
APP PUB NO 20070132021A1
SERIAL NO

11445181

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A semiconductor device includes a substrate having a recess, a gate electrode in the recess in the substrate, and a source electrode and a drain electrode disposed on opposite sides of the gate electrode. An insulating film is on at least on a surface of the gate electrode and a portion in the recess, other than where the gate electrode is located, and a shield electrode connected to the source electrode is located on a portion of the insulating film between the gate electrode and the drain electrode.

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Patent Owner(s)

  • MITSUBISHI DENKI KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amasuga, Hirotaka Tokyo , JP 10 61
Kunii, Tetsuo Tokyo, JP 20 188
Yamamoto, Yoshitsugu Tokyo, JP 32 454

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