Force sensors
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United States of America Patent
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-
Jun 17, 1986
Grant Date -
N/A
app pub date -
Jun 6, 1984
filing date -
Jun 7, 1983
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A piezoelectric beam structure for a vibrating beam force sensor in which three coplanar beams of piezoelectric material are spaced side by side and supported between respective common mountings at either end. The two outer counterbalancing beams in operation flex in opposite phase to the center main beam, with each beam flexing in a direction normal to the beam plane. A force sensor which includes this piezoelectric beam structure.
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