Bimetallic probe with tip end

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7692438
APP PUB NO 20080054916A1
SERIAL NO

10565156

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.

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First Claim

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Patent Owner(s)

  • JAPAN ELECTRONIC MATERIALS CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Egashira, Mitsuru Tsukuba, JP 7 11
Ishida, Akira Tsukuba, JP 80 1676
Kobayashi, Mikihiko Ishioka, JP 8 12
Konno, Takeshi Tsukuba, JP 117 742
Machida, Kazumichi Takarazuka, JP 14 139
Urata, Atsuo Ibaraki, JP 8 69

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