Electrolytic treatment apparatus and electrolytic treatment method

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United States of America Patent

PATENT NO 11427921
APP PUB NO 20210285119A1
SERIAL NO

16481939

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Abstract

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An electrolytic treatment apparatus 1 (1A) configured to perform an electrolytic treatment on a target substrate includes a substrate holder 10 and an electrolytic processor 20. The substrate holder 10 includes an insulating holding body 11 configured to hold the target substrate and an indirect negative electrode 12 disposed within the holding body 11. A negative voltage is applied to the indirect negative electrode 12. The electrolytic processor 20 is disposed to face the substrate holder 10 and configured to apply a voltage to the target substrate and an electrolyte in contact with the target substrate.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamada, Masato Kumamoto, JP 15 53
Hoshino, Tomohisa Kumamoto, JP 33 120
Matsumoto, Toshiyuki Kumamoto, JP 61 525

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