Apparatus and method for coating treatment
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United States of America Patent
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-
Jun 17, 2003
Grant Date -
Jan 17, 2002
app pub date -
May 10, 2001
filing date -
May 16, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for the coating treatment comprises a coating section for coating a substrate with a process solution, a heating section for heating the substrate coated with the process solution, and a recovery section for recovering at least a part of the solvent vapor contained in the hot exhaust gas discharged from the heating section. The recovery section includes a cooling apparatus, and the hot exhaust gas containing a solvent vapor generated from the substrate when the substrate is subjected to a heating treatment is passed through the cooling apparatus so as to cool and condense at least a part of the solvent vapor contained in the hot exhaust gas so as to recover the solvent in the form of a liquid.
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