Cantilever on cantilever structure
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United States of America Patent
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Sep 14, 2010
Grant Date -
Feb 12, 2009
app pub date -
Aug 10, 2007
filing date -
Aug 10, 2007
priority date (Note) -
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Abstract
In one embodiment, the present invention includes an apparatus having a first cantilever structure to move in a vertical direction, including a first plate formed of a conductive material, an insulation beam adapted on a portion of the first plate, and a second cantilever structure adapted on the insulation beam and including a second plate formed of a conductive material, where an air gap is present between the first and second plates. Other embodiments are described and claimed.
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